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Hiroaki Ashizawa
Hiroaki Ashizawa
Toto Ltd.
Dry etching
Analytical chemistry
Materials science
Oxide
Ceramic
1
Papers
9
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Plasma Exposure Behavior of Yttrium Oxide Film Formed by Aerosol Deposition Method
2016
ISSM | International Symposium on Semiconductor Manufacturing
Hiroaki Ashizawa
Masakatsu Kiyohara
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Citations (9)
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