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Mark Brandemuehl
Mark Brandemuehl
Reticle
Megabit
Image plane
Phase (waves)
Digital pattern generator
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Novel architecture for high-speed dual-image generation of pattern data for phase-shifting reticle inspection
1992
Kunihiro Hosono
Susumu Takeuchi
Yaichiro Watakabe
Tim Wihl
Mark Brandemuehl
David A. Joseph
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