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Jianan Hou
Jianan Hou
Lam Research
Plasma
Doping
Photoresist
Materials science
Analytical chemistry
2
Papers
1
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0
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Study of Post Plasma Doping Photoresist Strip
2012
CSTIC | China Semiconductor Technology International Conference
Shijian Luo
Frank Torregrosa
James DeLuca
Jianan Hou
Ivan Berry
Dwight Roh
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Optimization of cleanliness and oxidation in plasma doped photoresist strip
2012
James DeLuca
A. B. Lee
S. W. Jin
I. S. Jang
Jianan Hou
David Mattson
Shijian Luo
A. Scuderi
Y. J. Yang
Ivan Berry
Dwight Roh
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