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S. Uda
S. Uda
Osaka University
Dielectric
Chemical vapor deposition
Capacitor
Thin film
Tungsten
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Influences of atomic hydrogen on porous low-k dielectric for 45-nm node
2007
Thin Solid Films
K. Tomioka
E. Soda
N. Kobayashi
M. Takata
S. Uda
K. Ogushi
Y. Yuba
Yoichi Akasaka
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Citations (5)
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