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Shinji Yanaga
Shinji Yanaga
Optics
Electron-beam lithography
Cathode ray
Electron optics
Beam (structure)
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Development of a mask-scan electron beam mask writer
2002
Journal of Vacuum Science & Technology B
Shinsuke Nishimura
Mitsuko Shimizu
Soichiro Mitsui
Kiminobu Akeno
Hideo Kusakabe
Munehiro Ogasawara
Ryuji Hayashi
Shinji Yanaga
Noboru Kobayashi
Toru Tojo
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