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Naruhiko Kaji
Naruhiko Kaji
Plasma
Environmental chemistry
Exhaust gas
Waste management
Chemistry
2
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14
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2024
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Structural Studies of High-Performance Low-k Dielectric Materials Improved by Electron-Beam Curing
2005
Japanese Journal of Applied Physics
Takashi Yoda
Yasushi Nakasaki
Hideki Hashimoto
Keiji Fujita
Hideshi Miyajima
Miyoko Shimada
Rempei Nakata
Naruhiko Kaji
Nobuo Hayasaka
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Citations (14)
Reduction of PFC emissions by gas circulation cleaning in plasma CVD
2001
ISSM | International Symposium on Semiconductor Manufacturing
Rempei Nakata
H Kubota
Naruhiko Kaji
I. Sakai
Takashi Yoda
Katsuya Okumura
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