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Guillaume Schelcher
Guillaume Schelcher
IMEC
Materials science
Resist
Optoelectronics
AND gate
Process optimization
3
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2024
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Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects
2021
Etienne de Poortere
Nicola Kissoon
David Hellin
Stefan Decoster
Gayle Murdoch
Stephane Larivière
Elisabeth Camerotto
Sandip Halder
Philippe Leray
Malgorzata Jurczak
Guillaume Schelcher
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Machine learning for predictive electrical performance using OCD (Erratum)
2019
Sayantan Das
Joey Hung
Sandip Halder
Guillaume Schelcher
Roy Koret
Igor Turovets
Mohamed Saib
Anne-Laure Charley
Matthew Sendelbach
Avron Ger
Philippe Leray
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Co-optimization of exposure dose and etch process for SAQP pitch walk control
2018
Mark Maslow
Vadim Timoshkov
Ton Kiers
Liesbeth Reijnen
Tae Kwon Jee
Kaushik A. Kumar
Carlos Fonseca
Marc Demand
Guillaume Schelcher
Florin Cerbu
Christophe Beral
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