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Givi I. Jandjgava
Givi I. Jandjgava
Aluminium nitride
Silicon carbide
Materials science
Microstructure
Isotropic etching
2
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3
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Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition
1999
Victor V. Luchinin
Andrey V. Korlyakov
Givi I. Jandjgava
Stanislav V. Prosorov
Aleksander K. Solomatin
Anatoley V. Sorokin
Sergey G. Kucherkov
Leonid A. Severov
Valeriy K. Ponomarev
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Citations (1)
SiC-AlN-composition-based MEMS
1999
Victor V. Luchinin
Andrey V. Korlyakov
A. A. Vasilev
Givi I. Jandjgava
Stanislav V. Prosorov
Aleksander K. Solomatin
Anatoley V. Sorokin
Sergey G. Kucherkov
Leonid A. Severov
Valeriy K. Ponomarev
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Citations (2)
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