Old Web
English
Sign In
Acemap
>
authorDetail
>
Nicholas J. Chittock
Nicholas J. Chittock
Eindhoven University of Technology
Etching
Materials science
Isotropy
Plasma
Analytical chemistry
2
Papers
7
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Precise ion energy control with tailored waveform biasing for atomic scale processing
2020
Journal of Applied Physics
Tahsin Faraz
Yuri G. P. Verstappen
Marcel A. Verheijen
Nicholas J. Chittock
Javier Escandon-Lopez
Erik Heijdra
Wouter J. H. van Gennip
Wilhelmus M. M. Kessels
Adriaan J. M. Mackus
Show All
Source
Cite
Save
Citations (5)
Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3
2020
Applied Physics Letters
Nicholas J. Chittock
Martijn F. J. Vos
Tahsin Faraz
Wilhelmus M. M. Kessels
Hcm Harm Knoops
Adriaan J. M. Mackus
Show All
Source
Cite
Save
Citations (2)
1