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U. Weidenmueller
U. Weidenmueller
Lithography
Computer simulation
Monte Carlo method
Optics
Electron beam processing
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E-Beam direct write alignment strategies for the next generation node
2008
Proceedings of SPIE
H. Alves
Peter Hahmann
Karl-Heinz Kliem
U. Weidenmueller
S Jahr
C. G. Frase
D. Gnieser
Harald Bosse
Roy Zimmermann
C. Arndt
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