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Toru Kubota
Toru Kubota
Tokyo Institute of Technology
Analytical chemistry
Oxide
Materials science
Inorganic chemistry
Conductance
4
Papers
17
Citations
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Oxide and interface trap densities estimation in ultrathin W/La2O3/Si MOS capacitors
2012
Microelectronics Reliability
M. Mamatrishat
Toru Kubota
T. Seki
Kuniyuki Kakushima
Parhat Ahmet
Kazuo Tsutsui
Yoshinori Kataoka
Akira Nishiyama
Nobuyuki Sugii
Kenji Natori
Takeo Hattori
Hiroshi Iwai
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Citations (6)
Estimation of Interface and Oxide Defects in Direct Contact High-k/Si Structure by Conductance Method
2011
Toru Kubota
Hiroshi Iwai
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Citations (1)
Silicate Reaction Control at Lanthanum Oxide and Silicon Interface for Equivalent Oxide Thickness of 0.5 nm: Adjustment of Amount of Residual Oxygen Atoms in Metal Layer
2011
Japanese Journal of Applied Physics
Daisuke Kitayama
Toru Kubota
T. Koyanagi
Kuniyuki Kakushima
Parhat Ahmet
Kazuo Tsutsui
Akira Nishiyama
Nobuyuki Sugii
Kenji Natori
Takeo Hattori
Hiroshi Iwai
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Citations (10)
Precise Control of Silicate Reaction with La 2 O 3 Gate Dielectrics for EOT of 0.5 nm
2004
Daisuke Kitayama
Toru Kubota
T. Koyanagi
Kuniyuki Kakushima
Parhat Ahmet
Kazuo Tsutsui
Akira Nishiyama
Nobuyuki Sugii
K. Natori
Takeo Hattori
Hiroshi Iwai
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