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Jin-Moo Byun
Jin-Moo Byun
Dielectric
Thin film
Piezoelectric coefficient
Perovskite (structure)
Piezoelectric sensor
2
Papers
2
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0
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YieldStar uDBO overlay metrology in Samsung D1y DRAM volume production
2019
Jang-Sun Kim
Jin-Moo Byun
Remco Lancee
Jong-Hyun Hwang
Hyeon-Jun Ha
Kwang Young Hu
Se-Ra Jeon
Won-Jae Jang
Hyung-Sub Son
Vidar van der Meijden
Marc Noot
Bartosz Foltynski
Lukasz Macht
Grzegorz Grzela
Cedric Desire Grouwstra
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A study on the crystalline orientation and electric properties of sol-gel PZT thin film for piezoelectric sensors
2010
Journal of Sensor Science and Technology
Jin-Moo Byun
Ho-Nyun Lee
Hong-Kee Lee
Seong-Eui Lee
Hee Chul Lee
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Citations (2)
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