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V. Timochevski
V. Timochevski
Metallurgy
Sputter deposition
Surface roughness
Atomic physics
Electron mobility
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Electron Scattering in Narrow Metal Wires
2006
IITC | International Interconnect Technology Conference
D. Galla
J. M. Purswani
V. Timochevski
Y. Ke
H Guo
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