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S.Y. Oh
S.Y. Oh
Wonkwang University
Thin film
Silicon nitride
Analytical chemistry
Excimer laser
Laser
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Drastic improvement of as-sputtered silicon nitride thin film quality at room temperature by ArF excimer-laser annealing method
2016
Current Applied Physics
Du Young Choi
Hak-Ryul Kim
S.Y. Oh
Choong Hun Lee
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Citations (4)
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