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Tae-Seung Eom
Tae-Seung Eom
Error detection and correction
Exposure latitude
Depth of focus
Optical proximity correction
Photolithography
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Comparison study of mask error effects for various mask-making processes
1999
Tae-Seung Eom
Ikboum Hur
Youngmo Koo
Ki-Ho Baik
Il-Hyun Choi
Do Yun Kim
Chul Shin
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