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Matthew D. Poral
Matthew D. Poral
Sputtering
Beam diameter
Ion gun
Ion current
Secondary electrons
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Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source.
2012
Review of Scientific Instruments
Giovanni M. Malapit
Christian Lorenz S. Mahinay
Matthew D. Poral
Henry J. Ramos
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