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Kota Hosaka
Kota Hosaka
University of Tokyo
Microelectromechanical systems
Wafer
Cantilever
Analytical chemistry
CMOS
3
Papers
20
Citations
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Opportunities of CMOS-MEMS integration through LSI foundry and open facility
2017
Japanese Journal of Applied Physics
Yoshio Mita
Eric Lebrasseur
Yuki Okamoto
Frédéfic Marty
Ryota Setoguchi
Kentaro Yamada
Isao Mori
Satoshi Morishita
Yoshiaki Imai
Kota Hosaka
Atsushi Hirakawa
S. Inoue
Masanori Kubota
Matthieu Denoual
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Citations (11)
Evaluation of silicon fracture strength dependence on stealth dicing layers for “cleave-before-use” MEMS freestanding cantilever probes
2013
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Masanori Kubota
Kota Hosaka
Masakazu Sugiyama
Yoshio Mita
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Citations (2)
An integrated CMOS-MEMS probe having two-tips per cantilever for individual contact sensing and kelvin measurement with two cantilevers
2013
ICMTS | International Conference on Microelectronic Test Structures
Kota Hosaka
Satoshi Morishita
Isao Mori
Masanori Kubota
Yoshio Mita
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Citations (7)
1