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Archana Subramaniyan
Archana Subramaniyan
GlobalFoundries
Engineering
Tungsten
Composite material
Crystallization
Titanium
2
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7
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0
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Investigation on critical thickness dependence of ALD TiN diffusion barrier in MOL
2016
ASMC | Advanced Semiconductor Manufacturing Conference
Archana Subramaniyan
Domingo A. Ferrer Luppi
Neal A. Makela
Lawrence Bauer
Anita Madan
Richard Murphy
Frieder H. Baumann
Kriti Kohli
Christopher Parks
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Precleans challenges on middle-of-the-line contacts for 14nm technologies and beyond
2016
ASMC | Advanced Semiconductor Manufacturing Conference
Domingo A. Ferrer
Annie Levesque
Asli Sirman
Junedong Lee
Archana Subramaniyan
Lou Lanzerotti
David F. Hilscher
Emre Alptekin
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