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John Tsakirgis
John Tsakirgis
Leakage (electronics)
Silicon nitride
Plasma
Chemical vapor deposition
Dielectric strength
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Low-Temperature Deposition of High-Quality, Nanometer-Thick Silicon Nitride Film in Electron Cyclotron Resonance (ECR) Plasma-Enhanced CVD System
2005
Ling Xie
Jiangdong Deng
Steve Shepard
John Tsakirgis
Erli Chen
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