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Y. Kaminura
Y. Kaminura
Sputtering
Ion beam
Ion gun
Atomic physics
Analytical chemistry
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Metallic ion generation from ceramic rods by ECR ion source and thermodynamic feature of vaporization
1997
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
W. Yokota
T. Nara
Kazuo Arakawa
M. Ide
Y. Kaminura
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