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Yushu Ma
Yushu Ma
University of Michigan
Microsystem
Engineering
Encapsulation (computer programming)
Atomic layer deposition
Silicon
4
Papers
26
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An Autonomous Environmental Logging Microsystem (ELM) for Harsh Environments
2021
IEEE Sensors Journal
Yu Sui
Alexander Benken
Yushu Ma
Andrew Trickey-Glassman
Tao Li
Yogesh B. Gianchandani
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Autonomous Microsystems for Downhole Applications: Design Challenges, Current State, and Initial Test Results
2017
Sensors
Myungjoon Choi
Yuefei Sui
Inhee Lee
Ryan Meredith
Yushu Ma
Gyouho Kim
David T. Blaauw
Yogesh B. Gianchandani
Tao Li
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Citations (9)
A Low-Temperature Batch Mode Packaging Process for Submillimeter Microsystems in Harsh Environment Applications
2016
IEEE Transactions on Components, Packaging and Manufacturing Technology
Yushu Ma
Tao Li
Yogesh B. Gianchandani
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Citations (2)
A Submillimeter Package for Microsystems in High-Pressure and High-Salinity Downhole Environments
2015
IEEE\/ASME Journal of Microelectromechanical Systems
Yushu Ma
Yu Sui
Tao Li
Yogesh B. Gianchandani
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Citations (15)
1