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Katrin Heger
Katrin Heger
Embedded system
Environmental science
Remote plasma
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"Optimizing Remote Plasma Cleans Through Real-Time
2006
A. T. Charlie Johnson
Mark Ian Sistern
Katrin Heger
Th. Grau
Fridolin Weber
Stephan Becher
John T. Weber
Yvonne. Cheng
Y. G. Wang
J. K. Lan
Gwo-Jen Hwang
Maggie ONeill
Chi-Feng Chen
Eugene J. Karwacki
Philip Liu
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