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Zhen-Yu Xing
Zhen-Yu Xing
Soochow University (Suzhou)
Atomic physics
Plasma
Dielectric
Inductively coupled plasma
Capacitively coupled plasma
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PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES: CHF3 Dual-Frequency Capacitively Coupled Plasma
2008
Chinese Physics Letters
Yijun Xu
Chao-Ye
Xiao-Jiang Huang
Jing Yuan
Zhen-Yu Xing
Zhao-Yuan Ning
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