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Hideki Maezaki
Hideki Maezaki
Electron-beam lithography
Reactive-ion etching
Stencil lithography
X-ray lithography
Photolithography
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Organotin-Containing Resists (TMAR) for X-Ray Lithography : Resist Material and Process
1991
Youko Tanaka
Hideo Horibe
Shigeru Kubota
Hiroshi Koezuka
Nobuyuki Yoshioka
Satoshi Aoyama
Yaichioh Watakabe
Hideki Maezaki
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