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Hiroyuki Amikawa
Hiroyuki Amikawa
Pillar
Transistor
Optoelectronics
Silicon
Analytical chemistry
4
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Silicon Pillar Fabricated for SGT with Varying the Content of O2 in Cl2/O2 Gases by Using ECR Plasma Etching
2006
Takeshi Hidaka
Hiroyuki Amikawa
Hiroki Nakamura
Fujio Masuoka
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Fabrication of nanometer silicon pillars for buried-gate-type surrounding gate transistor by silicon quasi-isotropic etching
2006
Japanese Journal of Applied Physics
Takeyuki Kitagawa
Takeshi Hidaka
Takuya Ohba
Hiroyuki Amikawa
Takashi Izumida
Syuuhei Ohtsu
Hiroki Nakamura
Hiroshi Sakuraba
Fujio Masuoka
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Vertical Si Pillar Fabricated by ECR Plasma Etching with Precise Control of O2 Flow Rate in Cl2/O2 Mixtures
2004
Takeshi Hidaka
Hiroyuki Amikawa
Hiroki Nakamura
Hiroshi Sakuraba
Fujio Masuoka
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The Fabrication of Nanometer Silicon Pillar Channel for Buried Gate Type Surrounding Gate Transistor by Silicon Isotropic Etching
2004
T. Kitagawa
Hiroyuki Amikawa
T. Izumda
S. Ohtsu
Hiroki Nakamura
Hiroshi Sakuraba
Fujio Masuoka
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