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Myoungwoon Kim
Myoungwoon Kim
Samsung
Aspect ratio (aeronautics)
Polymer
Etching
Manufacturing engineering
Engineering
3
Papers
4
Citations
0
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Study on defect reduction for high aspect ratio etch process
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Jinseok Lee
Myoungwoon Kim
Jae Bong Lee
Jiho Uh
Sangjin Choi
Taeyang Yoon
Kyuchul Shim
Kyoung-Soo Lee
Hoosub Cheon
Taekyun Kang
Han Seo Ko
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Citations (2)
Study on defect reduction for high aspect ratio etch process
2017
ASMC | Advanced Semiconductor Manufacturing Conference
Jinseok Lee
Myoungwoon Kim
Jae Bong Lee
Jiho Uh
Sangjin Choi
Taeyang Yoon
Kyuchul Shim
Kyoung-Soo Lee
Hoosub Cheon
Taekyun Kang
Han Seo Ko
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Citations (1)
Optimizing Cleaning Period of Oxide Etcher Using Optical Emission Spectroscopy
2011
Gil Su Son
Yong-Han Roh
Geun Young Yeom
Su-Hong Kim
Myoungwoon Kim
Hyung-Chul Cho
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Citations (1)
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