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Willem van Mierlo
Willem van Mierlo
ASML Holding
Metrology
Reticle
Materials science
Resist
Dram
2
Papers
1
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0
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2024
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Extending EUV lithography for DRAM applications (Conference Presentation)
2020
Gijsbert Rispens
Claire van Lare
Dorothe Oorschot
Rik Hoefnagels
Shih-Hsiang Liu
Willem van Mierlo
Nadia Zuurbier
Zoi Dardani
Ziyang Wang
Mark John Maslow
Jo Finders
Roberto Fallica
Andreas Frommhold
Eric Hendrickx
Ardavan Niroomand
Scott L. Light
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In-resist pattern shift metrology
2018
Anita Bouma
B Bart Smeets
Lei Zhang
Thuy T. T. Vu
Peter de Loijer
Maikel Robert Goosen
Willem van Mierlo
Wendy Liebregts
Bart Rijpers
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