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Paul van Adrichem
Paul van Adrichem
IMEC
Optics
Logic synthesis
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Pupil
Physics
2
Papers
3
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EUV pupil optimization for 32nm pitch logic structures
2018
David Rio
Victor M. Blanco Carballo
Joern-Holger Franke
Mircea Dusa
Etienne de Poortere
S. Biesemans
Kathleen Nafus
Werner Gillijns
Eric Hendrickx
Paul van Adrichem
Kateryna Lyakhova
Chris Spence
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Citations (2)
Aerial image simulations of soft and phase defects in 193-nm lithography for 100-nm node
2002
Frank A.J.M. Driessen
Paul van Adrichem
Vicky Philipsen
Rik Jonckheere
Hua-Yu Liu
Linard Karklin
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Citations (1)
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