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K. S. Röver
K. S. Röver
Oxide
Ellipsometry
Surface roughness
Refractive index
Inorganic chemistry
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In-line Characterization of Thin Polysilicon Films by Variable Angle Spectroscopic Ellipsometry
2000
MRS Proceedings
S. Paprotta
K. S. Röver
R. Ferretti
U. Höhne
Jan-Dirk Kähler
J. Haase
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