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Ching-Wen Cho
Ching-Wen Cho
Particle
Effective method
Leakage (electronics)
Plasma
Electrode
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Real-time detection of chamber condition by observing the plasma spectrum intensity
1998
Ching-Wen Cho
Yuan-Ko Hwang
Po-Tao Chu
Y. S. Peng
Chia-Hsiang Chen
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