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H. Tafelmeier
H. Tafelmeier
Polymer chemistry
Ion plating
Oxide
Plasma
Faraday cup
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Reactive Low Voltage Ion Plating (RLVIP). Prozess‐, Plasma‐ und Schichteigenschaften am Beispiel von Ta2O5/SiO2
2005
Vakuum in Forschung Und Praxis
S. Schlichterle
Georg Strauss
H. Tafelmeier
D. Huber
Hans K. Pulker
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Citations (3)
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