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S. Fourment
S. Fourment
Hoffmann-La Roche
Electronic engineering
Linear encoder
Photodiode
Interferometry
Chip
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A silicon integrated opto-electro-mechanical displacement sensor
2004
Sensors and Actuators A-physical
S. Fourment
P. Arguel
J.-L. Noullet
F. Lozes
S. Bonnefont
G. Sarrabayrouse
Y. Jourlin
J. Jay
O. Parriaux
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