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Yoshihide Katoh
Yoshihide Katoh
Optics
Pattern formation
Beam diameter
Laser beam quality
Beam (structure)
3
Papers
14
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Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation : Lithography Technology
1989
Kiyoshi Hattori
Osamu Ikenaga
Hitotsugu Wada
Syuichi Tamamushi
Eiji Nishimura
Naotaka Ikeda
Yoshihide Katoh
Hideo Kusakabe
Ryoichi Yoshikawa
Tadahiro Takigawa
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Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation
1989
Japanese Journal of Applied Physics
Kiyoshi Hattori
Osamu Ikenaga
Hirotsugu Wada
Syuichi Tamamushi
Eiji Nishimura
Naotaka Ikeda
Yoshihide Katoh
Hideo Kusakabe
Ryoichi Yoshikawa
Tadahiro Takigawa
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Citations (14)
Proximity Effect Correction for 1/4 μm Pattern Formation in Electron Beam Lithography
1985
The Japan Society of Applied Physics
Tadahiro Takigawa
Eiji Nishimura
Syuichi Tamamushi
Yoshihide Katoh
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