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Lois Lo-I Newark Lin
Lois Lo-I Newark Lin
DuPont
Chemistry
Hydrocarbon
Radical
Halogen
Alkyl
2
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14
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Transparent fluids for 157-nm immersion lithography
2004
Journal of Micro-nanolithography Mems and Moems
Roderick R. Kunz
Michael Switkes
Roger F. Sinta
Jane E. Curtin
Roger H. French
Robert Clayton Wheland
Chien-Ping Chai Kao
Michael P. Mawn
Lois Lo-I Newark Lin
Paula M. Wetmore
Val J. Krukonis
Kara Williams
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Citations (14)
Refrigerant compositions of halogenated hydrocarbons containing polymeric oil-return agents.
1999
Glenn Scott Shealy
Andrew Edward Feiring
Barbara Haviland Minor
Lois Lo-I Newark Lin
Hans Di Spauschus
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