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T S Abramovich
T S Abramovich
Plasma
Optoelectronics
Materials science
Etching
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Application of the Atomic Layer Etching technique to remove broken layers after plasma-etched GaAs surface treatment
2020
V S Klimin
A A Rezvan
T S Abramovich
T. A. Zubova
R V Tominov
Z. E. Vakulov
I N Kots
O. A. Ageev
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