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Lorena Ferry
Lorena Ferry
Hitachi
Scanning electron microscope
Extreme ultraviolet
Photoresist
Beam (structure)
Shrinkage
1
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14
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Experimental validation of 2D profile photoresist shrinkage model
2011
Proceedings of SPIE
Benjamin Bunday
Aaron Cordes
Andy Self
Lorena Ferry
Alex Danilevsky
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