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Gary Ditmer
Gary Ditmer
Analytical chemistry
Metrology
Wafer
Atomic layer deposition
Materials science
3
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2
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0
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Plasma-Enhanced Atomic Layer Deposition Sealing Property on Extreme Low-k Film with k = 2.0 Quantified by Mass Metrology
2013
Japanese Journal of Applied Physics
Dai Ishikawa
Akiko Kobayashi
Akinori Nakano
Yosuke Kimura
Kiyohiro Matsushita
Nobuyoshi Kobayashi
Gary Ditmer
Adrian Kiermasz
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Characterization of Oxidation Induced Substrate Loss
2010
CSTIC | China Semiconductor Technology International Conference
Liam Cunnane
Darren Moore
Carlo Waldfried
Shijian Luo
Adrian Kiermasz
Gary Ditmer
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Application of Mass Metrology in Advanced Device Manufacture
2007
Gary Ditmer
Liam Cunnane
Adrian Kiermasz
Robert John Wilby
Eddy Kunnen
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