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Martin Liese
Martin Liese
Impedance matching
Waveform
Electronic engineering
Capacitive sensing
Voltage
2
Papers
31
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Control of electron heating and ion energy distributions in capacitive plasmas by voltage waveform tailoring based on a novel power supply and impedance matching
2015
Bulletin of the American Physical Society
Birk Berger
James Franek
Steven Brandt
Martin Liese
Matthias Barthel
Edmund Schuengel
M. E. Koepke
J. Schulze
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Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms
2015
Review of Scientific Instruments
James Franek
Steven Brandt
Birk Berger
Martin Liese
Matthias Barthel
Edmund Schüngel
J. Schulze
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Citations (31)
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