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Stepan Kmet
Stepan Kmet
Sputter deposition
Thin film
High-power impulse magnetron sputtering
Sputtering
Cathode
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Reactive sputtering of Fe2O3 thin films by high power pulsed plasma systems
2012
Zdenek Hubicka
M. Čada
Stepan Kmet
Jiri Olejnicek
Tomas Kubart
J. Adamek
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