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Shinji Kubo
Shinji Kubo
Hitachi
Materials science
Metrology
Voltage
Analytical chemistry
Resist
4
Papers
2
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3D-NAND wafer process monitoring using high voltage SEM with auto e-Beam tilt technology
2020
Leeming Tu
Jian Mi
Henry Fan
Haydn Zhou
Felix Xiong
Louis Tu
Gangyi Chen
Chuanyu Shao
Long Zhang
Shinji Kubo
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ホットスポット絞り込み装置、ホットスポット絞り込み方法、ホットスポット絞り込みプログラム、ホットスポット検査装置、および、ホットスポット検査方法
2007
Koji Arai
Tomohiro Funakoshi
Norio Hasegawa
Shinji Kubo
Shigeki Kurihara
Ryoichi Matsuoka
Hideo Sakai
Aritoshi Sugimoto
sinzi kubo
kouzi arai
ari syun sugimoto
ryouiti matuoka
eiyuu sakae i
sigeki kurihara
tomohiro funakosi
noboru osu hasegawa
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Study of development methods for chemical amplification resist
1998
Hidetaka Saitoh
Takashi Soga
Shinji Kubo
S. Sanki
A. M. Hoga
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Development methods for chemical amplification resist
1998
Hidetaka Saitoh
Takashi Soga
Shinji Kubo
Syuichi Sanki
Morihisa Hoga
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