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Gotz Thorwarth
Gotz Thorwarth
Surface roughness
Microfluidics
Biocompatible material
Wafer
Fabrication
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Wafer level low temperature bonding of industrial glass substrates for life science
2019
Anke Sanz-Velasco
Gotz Thorwarth
Roger Nadler
Igor Drmic
Winfried Arens
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