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Azat Latypov
Azat Latypov
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Rice's formula
Physics
Random field
Resist
Gaussian
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Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
2020
Azat Latypov
Gurdaman Khaira
Germain Fenger
John L. Sturtevant
Chih-I Wei
Peter De Bisschop
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