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Vitaly Domnenko
Vitaly Domnenko
Synopsys
Extreme ultraviolet lithography
Resist
Electronic engineering
Lithography
Computer science
2
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2
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0
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EUV computational lithography using accelerated topographic mask simulation
2019
Vitaly Domnenko
Bernd Küchler
Wolfgang Hoppe
Jurgen Preuninger
Ulrich Klostermann
Wolfgang Demmerle
Martin Bohn
Dietmar Krüger
Ryoung-Han Kim
Ling Ee Tan
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Rigorous ILT optimization for advanced patterning and design-process co-optimization
2018
Kosta Selinidis
Bernd Kuechler
Howard Cai
Kyle Braam
Wolfgang Hoppe
Vitaly Domnenko
Amyn Poonawala
Guangming Xiao
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