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Nathaniel Langdon
Nathaniel Langdon
Dry etching
Shallow trench isolation
Geology
Composite material
Silicon
2
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Silicon Dry Etch Process for Shallow Trench Isolation
2002
Nathaniel Langdon
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Conference of Microelectronics Research 2002
2002
Eric Poortinga
James Guerrero
Frank Cropanese
Brian Martinick
Jesse Siman
Chris Harvey
James Tom
Robin Catalano
Nathaniel Langdon
Eric Dolatowski
Luc Dupre
Elias Ullah
Michael Meagher
Brian Miga
Sean Houlihan
Kautilya Sachdeva
Deoram Persaud
Erik Wheeler
Matt Shepard
Neal Lafferty
Vimalan Rajalingam
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