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W.-Y. Lee
W.-Y. Lee
TSMC
Metrology
Noise reduction
Scanning electron microscope
Semiconductor device fabrication
Leakage (electronics)
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SEM metrology damage in polysilicon line and its impact on LWR evaluation
2009
Proceedings of SPIE
Sophia Wang
W.-Y. Lee
Y. H. Chiu
H.J. Tao
Yuh-Jier Mii
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