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Bunday Benjamin
Bunday Benjamin
Optical microscope
Optics
Nanomanufacturing
Physics
Aspect ratio (aeronautics)
4
Papers
3
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Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy Optical Microscopy
2018
Measurement Science and Technology
Ravikiran Attota
Hyeonggon Kang
Keana C. Scott
Richard A. Allen
András E. Vladár
Bunday Benjamin
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Metrology Capabilities and Needs for 7nm and 5nm Logic Nodes
2017
Bunday Benjamin
Solecky Eric
Vaid Alok
A. F. Bello
Dai Xintuo
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Documentation for Reference Material (RM) 8820: A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy
2014
Michael T. Postek
Andras Vladar
Bin Ming
Bunday Benjamin
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インラインE-ビームウエハ計測および欠陥検査:イメージに基づく限界寸法計測時代の終わり?欠陥検査の新しい時代
2013
Solecky Eric
D Patterson Oliver
Stamper Andrew
Mclellan Erin
Buengener Ralf
Vaid Alok
Hartig Carsten
Bunday Benjamin
Arceo Abraham
Cepler Aron
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