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Nakyoon Kim
Nakyoon Kim
KLA-Tencor
Metrology
Wafer
Process control
Computer science
Electronic engineering
2
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In-cell overlay metrology by using optical metrology tool
2018
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Hyowon Park
Waley Liang
Dongsub Choi
Nakyoon Kim
Jeongpyo Lee
Stilian Ivanov Pandev
Sanghuck Jeon
John C. Robinson
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Clean focus, dose and CD metrology for CD uniformity improvement
2018
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Nakyoon Kim
John C. Robinson
Markus Mengel
Rovira Pablo
Sungchul Yoo
Raphael Jean Michel Marie Getin
Dongsub Choi
Sanghuck Jeon
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