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Martin Plihal
Martin Plihal
KLA-Tencor
Metrology
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5
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8
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High-throughput, nondestructive assessment of defects in patterned epitaxial films on silicon by machine learning-enabled broadband plasma optical measurements
2019
ASMC | Advanced Semiconductor Manufacturing Conference
Shravan Matham
Curtis Durfee
Brock Mendoza
Devendra K. Sadana
Stephen W. Bedell
John G. Gaudiello
Sean Teehan
Heungsoo Choi
Ankit Jain
Martin Plihal
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EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems
2018
Kaushik Sah
Andrew Cross
Martin Plihal
Vidyasagar Anantha
Raghav Babulnath
Derek Fung
Peter De Bisschop
Sandip Halder
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Novel methods for SPC defect monitoring: Normalizable diversity sampling: Defect inspection
2016
ASMC | Advanced Semiconductor Manufacturing Conference
Ian Tolle
Ankit Jain
Martin Plihal
Sumanth Kini
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Mise en forme d'échantillons de production préservant la re-normalisabilité
2015
Martin Plihal
Ankit Jain
Michael Lennek
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Surveillance d'une performance de classification de défaut variant dans le temps
2010
Patrick Huet
Brian Duffy
Martin Plihal
Thomas Trautzsch
Chris Maher
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