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Hanne De Coster
Hanne De Coster
Katholieke Universiteit Leuven
Materials science
Nano-
Atomic physics
Oxide
Analytical chemistry
2
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3
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0
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Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
2018
Microelectronic Engineering
G. Vereecke
Hanne De Coster
Senne Van Alphen
Patrick Carolan
Hugo Bender
Kherim Willems
Lars-Ake Ragnarsson
Pol Van Dorpe
Naoto Horiguchi
Frank Holsteyns
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Citations (3)
Kinetics of chemical etching in nano-confined volumes
2016
Guy Vereecke
Hanne De Coster
Patrick Carolan
Hugo Bender
Kherim Willems
Lars-Ake Ragnarsson
Pol Van Dorpe
Naoto Horiguchi
Frank Holsteyns
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