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Nikolay A. Artemiev
Nikolay A. Artemiev
KLA-Tencor
Optics
Physics
Microscope
Interferometry
Metrology
3
Papers
16
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High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments
2016
Review of Scientific Instruments
Valeriy V. Yashchuk
Nikolay A. Artemiev
Gary Centers
Arthur Chaubard
Ralf D. Geckeler
Ian Lacey
Harry Marth
Wayne R. McKinney
Tino Noll
Frank Siewert
Mathias Winter
Thomas Zeschke
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Citations (11)
Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope
2015
Review of Scientific Instruments
Valeriy V. Yashchuk
P. J. Fischer
E. R. Chan
R. Conley
Wayne R. McKinney
Nikolay A. Artemiev
Nathalie Bouet
Stefano Cabrini
Giuseppe Carlo Calafiore
Ian Lacey
Christophe Peroz
Sergey A. Babin
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Citations (5)
Nuclear Instruments and Methods in Physics Research A
2013
Valeriy V. Yashchuk
Wayne R. McKinney
Nikolay A. Artemiev
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